RotaQ ES
Rotary pumped coater suitable for sputtering non-oxidising metals (Au, Au/Pd, Ag, Pt, and Pt/Pd), and carbon evaporation.
Q300T ES Plus
Key Features
- Capable of achieving vacuum of 5x10⁻⁵ mbar
- Single sputter head allows coating of samples up to 150 mm Ø
- Touch and swipe capacitive screen
- USB port for upgrades and download of process log files
- Multiple-user profiles can be set up on one instrument
- 16GB of memory can store more than 1000 recipes
- Multi-colour LED visual status indicator
- 1 x Chromium target as standard
- Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt
- Capable of carbon rod evaporation (carbon fibre evaporation available as option)
Details
The Q300T ES Plus is a turbomolecular-pumped combined sputter and carbon coater suitable for coating samples up to 150 mm Ø.
Applications
- High resolution SEM E Large samples e.g Silicon Wafers (up to 150 mm)
- Protective platinum layers for FIB
- Carbon coating for elemental analysis and TEM
Specifications
Product Information
- Single sputter head
- Large Chamber (300 mm Ø) E Pump-down Vacuum: 5x10 mbar
- Chromium and Carbon rod as standard
Instrument case
590 mm W x 535 mm D x 420 mm H (maximum height during the opening of the coating head: 772 mm)
Weight
36 kg (packed: 59 kg)
Packed dimensions
730 mm W x 630 mm D x 690 mm H
Work chamber
Borosilicate glass with integral PET implosion guard Size 300 mm outside diameter x 127 mm High
Display
115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display
User interface
Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due
Sputter target
Disc-style 57 mm Ø. A 0.5 mm thick chromium (Cr) is fitted as standard.
Specimen stage
A flat adjustable stage capable of accepting either 4” or 6” wafers is mounted on a swinging arm stage, which rotates the stage under the targets to optimise coating. Rotation speed is variable from 14rpm to 38rpm
Downloads and Specifications
More information
Fill in your details and a member of the team will get back to you shortly.
Related products
TurboQ ES
Turbo pumped coater suitable for sputtering oxidising and non-oxidising metals, and carbon evaporation, designed for ultra-high-resolution SEM and FIB-SEM applications.
TurboQ S
Turbo pumped coater suitable for sputtering oxidising and non-oxidising metals, designed for ultra-high-resolution SEM and FIB-SEM applications.
RotaQ S
Rotary pumped coater suitable for sputtering non-oxidising metals (Au, Au/Pd, Ag, Pt, and Pt/Pd).
Q150 GB
Turbo pumped coater suitable for sputtering oxidising and non-oxidising metals, and carbon evaporation. Modular design enables vacuum chamber to be mounted into a glovebox.
MiniQ S
Entry-level coater, equipped with rotary pump, suitable for sputter coating non-oxidising metals (Au, Au/Pd and Ag).
RotaQ E
Rotary pumped coater suitable for carbon evaporation.
TurboQ E
Turbo pumped coater suitable for carbon evaporation, designed for ultra-high-resolution SEM and FIB-SEM applications.
Q300T D Plus
Dual sputter head turbo pumped coater with large chamber ideal for coating large samples up to 200 mm with two metals. Suitable for sputtering oxidising and non-oxidising metals.
Q300T T Plus
Triple sputter head turbo pumped coater with large chamber ideal for coating large samples up to 200 mm with one metal. Suitable for sputtering oxidising and non-oxidising metals.
Q300T ES Plus
Turbo pumped coater with large chamber ideal for coating large samples up to 150 mm Ø. Suitable for sputtering oxidising and non-oxidising metals, and carbon evaporation.