RotaQ ES
Rotary pumped coater suitable for sputtering non-oxidising metals (Au, Au/Pd, Ag, Pt, and Pt/Pd), and carbon evaporation.
Q300T T Plus
Key Features
- Capable of achieving vacuum of 5x10⁻⁵ mbar
- Triple sputter head allows coating of samples up to 200 mm Ø
- Touch and swipe capacitive screen
- USB port for upgrades and download of process log files
- Multiple-user profiles can be set up on one instrument
- 16GB of memory can store more than 1000 recipes
- Multi-colour LED visual status indicator
- 3 x Chromium target as standard
- Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt
Details
The Q300T T Plus is a large chamber, turbo-pumped coating system, ideally suited for sputtering a single large diameter specimen up to 8″/200mm or multiple smaller specimens over a similar diameter. Ideal for thin-film applications and SEM/FE-SEM. It is fitted with three sputtering heads to ensure even deposition of individual large specimens or multiple specimens.
Applications
- Large samples e.g. Silicon Wafers (up to 200 mm Ø ) or multiple small samples
- Wafer inspection
- Multiple sample preparation for SEM
- Thin-film applications and SEM/FE-SEM
Specifications
Product Information
- Triple sputter head single target
- Large Chamber (300 mm Ø)
- Pump-down Vacuum: 5x10⁻⁵ mbar
Instrument case
590mm W x 535mm D x 420mm H (maximum height during the opening of the coating head: 772mm)
Weight
36 kg (packed: 59kg)
Packed dimensions
730 mm W x 630 mm D x 690 mm H
Work chamber
Borosilicate glass with integral PET implosion guard Size 300 mm outside diameter x 127 mm High
Display
115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display
User interface
Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due
Sputter target
3 x Disc-style 57 mm Ø. A 0.5 mm thick chromium (Cr) is fitted as standard. Pt, Pt/Pd, Pt, Au, Au/Pd, Ni, Ag, Pd, Cu, Cr, W, Al, Ti, Fe, Ir, Co, Sn, Mo, Mg, Ta and ITO target options available in various thicknesses.
Specimen stage
A flat rotation stage for 6”(150mm) and 8” (200mm) wafers is fitted as standard.
A rotating/tilt stage and the ‘rota cota’ rotary tilt stage are also options
NB: Please note it is not possible to sequentially sputter three different sputtering metals from each sputtering head – for sequential coating see the Q300T D Plus.
Downloads and Specifications
More information
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